I
You might use an oil pump for rough, and some can get to 10E-4 t but if you use them you need a foreline trap, inline molecular sieve filter or something similar.
Likely Typo: 10E-4 in computer scientific notation is 10 x 10^-4 = 10^-3. You probably meant 1E-4 = 1x10^-4 = 10^-4 = 1/10000