https://www.kyodo-inc.co.jp/english/index.html
vendor is Kyodo, and you can see the example of nano-imprinter application to nano-structure. I show you nano structure fabrication in this post.
3D is possible and I am designing semi-3D nano-structure, and the important feature is that convex nano structure can be fabricated with nano-imprinting.
I am looking for the researcher to verify my proposal so, if you are interested in nano-structure with surface potential control, I hope you will help me.