Nagamitsu Yoshimura Vacuum Technology Practice for Scientific Instruments. Springer 2007
A free pdf.
Many scientific instruments for analyzing specimen surface such as the electron
microscope and the Auger electron spectrometer require clean, ultrahigh vacuum.
The electron microscope and Auger electron spectrometer need fine electron probe,
requiring a field emission emitter which can well work under ultrahigh vacuum. In
the electron microscope and the ion microscope, microdischarges due to applying
high voltage to electrodes sometime occur, resulting in deterioration of image quality. Microdischarges are related with the gas molecules on the surfaces of insulators
and electrodes.
For many scientific instruments such as the electron microscope, a very clean, ultrahigh vacuum is necessary in the vicinity of the specimen and the electron emitter.
So, ultrahigh vacuum technology is essential for microscope engineers and microscope users.
This book consists of the following chapters:
Chapter 1 Designing of Evacuation Systems
Chapter 2 Vacuum Pumps
Chapter 3 Simulation of Pressures in High-Vacuum Systems
Chapter 4 Outgassing
Chapter 5 Phenomena Induced by Electron Irradiation
Chapter 6 Vacuum Gauges
Chapter 7 Microdischarges in High Vacuum
Chapter 8 Emitters for Fine Electron Probes
Some important articles on the subject of every chapter are reviewed, and their discussions and conclusions are presented in rather high detail. The author believes
that Chaps. 1, 2, 3, 4, 5, 6 would help the engineers who engage in designing the
vacuum systems of ultrahigh vacuum scientific instruments such as electron microscopes. Chapters 7 and 8 will help the users of the scientific instruments using
electron probes to understand the key technology intrinsic to electron beam systems,
like high-voltage discharge and narrow electron beam emitter.
http://www-eng.lbl.gov/~shuman…EFs/Vacuum-Technology.pdf