I use a hydrofill station and a hydrostik for such things. (with a cold trap - dry ice acetone)
The hydrostik last through a lot of experiments, cleans up the gas (since it is a metal hydrogen storage item), and limits the pressure into the system. The fill station is a bit expensive but so are a couple of lecture bottles and regulators.
If you don't use a cold trap and don't do a system bake out (or vary long vacuum clean outs) you will see water (and some N2) in the RPG. Also you might notice that the vacuum down of the system kind of stops at around 20 or so C due to water vapor (H reacting with O2 on the SS surfaces). Not to worry, heat the system and pump for a day or two.
Again, be sure to use metal gaskets, conflat or VCR fittings, or you may have trouble getting to 10E-8 torr. High purity bellow valves are preferred.
Good luck and do your homework.